La Metrología Óptica y sus Aplicaciones
PDF (Español (España))

Keywords

Optical metrology
Interferometry.

Abstract

In this work an introduction to optical metrology is presented with a brief description of its main tool which is interferometry. Also, a survey of the main different methods used in optical metrology is described with a special emphasis on the most recent developments.
https://doi.org/10.15174/au.2005.218
PDF (Español (España))